JPS6157601B2 - - Google Patents
Info
- Publication number
- JPS6157601B2 JPS6157601B2 JP56048411A JP4841181A JPS6157601B2 JP S6157601 B2 JPS6157601 B2 JP S6157601B2 JP 56048411 A JP56048411 A JP 56048411A JP 4841181 A JP4841181 A JP 4841181A JP S6157601 B2 JPS6157601 B2 JP S6157601B2
- Authority
- JP
- Japan
- Prior art keywords
- glass substrate
- laser beam
- optical
- flat glass
- optical waveguide
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 230000003287 optical effect Effects 0.000 claims description 27
- 239000011521 glass Substances 0.000 claims description 26
- 239000000758 substrate Substances 0.000 claims description 24
- 239000005357 flat glass Substances 0.000 claims description 16
- 238000000034 method Methods 0.000 claims description 11
- 238000004519 manufacturing process Methods 0.000 claims description 8
- 239000007789 gas Substances 0.000 claims description 5
- 238000000151 deposition Methods 0.000 claims description 4
- 239000002994 raw material Substances 0.000 claims description 4
- 230000001678 irradiating effect Effects 0.000 claims description 3
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 2
- 229910052760 oxygen Inorganic materials 0.000 claims description 2
- 239000001301 oxygen Substances 0.000 claims description 2
- CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 description 14
- 229910002092 carbon dioxide Inorganic materials 0.000 description 7
- 239000001569 carbon dioxide Substances 0.000 description 7
- 230000005540 biological transmission Effects 0.000 description 4
- 239000000463 material Substances 0.000 description 4
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 4
- 238000005229 chemical vapour deposition Methods 0.000 description 3
- RLOWWWKZYUNIDI-UHFFFAOYSA-N phosphinic chloride Chemical compound ClP=O RLOWWWKZYUNIDI-UHFFFAOYSA-N 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 3
- 229910003902 SiCl 4 Inorganic materials 0.000 description 2
- 238000011161 development Methods 0.000 description 2
- 230000018109 developmental process Effects 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 239000013307 optical fiber Substances 0.000 description 2
- 238000007254 oxidation reaction Methods 0.000 description 2
- 238000000206 photolithography Methods 0.000 description 2
- 239000002861 polymer material Substances 0.000 description 2
- 239000010453 quartz Substances 0.000 description 2
- MYMOFIZGZYHOMD-UHFFFAOYSA-N Dioxygen Chemical compound O=O MYMOFIZGZYHOMD-UHFFFAOYSA-N 0.000 description 1
- 229910006113 GeCl4 Inorganic materials 0.000 description 1
- 229910005793 GeO 2 Inorganic materials 0.000 description 1
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- 230000032683 aging Effects 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 229910001882 dioxygen Inorganic materials 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 238000001459 lithography Methods 0.000 description 1
- 239000000178 monomer Substances 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 229920006254 polymer film Polymers 0.000 description 1
- 230000002250 progressing effect Effects 0.000 description 1
- 238000012827 research and development Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- IEXRMSFAVATTJX-UHFFFAOYSA-N tetrachlorogermane Chemical compound Cl[Ge](Cl)(Cl)Cl IEXRMSFAVATTJX-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/02—Surface treatment of glass, not in the form of fibres or filaments, by coating with glass
Landscapes
- Chemical & Material Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Geochemistry & Mineralogy (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- Optical Integrated Circuits (AREA)
- Surface Treatment Of Glass (AREA)
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP56048411A JPS57163204A (en) | 1981-04-02 | 1981-04-02 | Production of optical waveguide on glass substrate |
| US06/364,048 US4411678A (en) | 1981-04-02 | 1982-03-31 | Method for fabricating an optical waveguide on a planar glass substrate |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP56048411A JPS57163204A (en) | 1981-04-02 | 1981-04-02 | Production of optical waveguide on glass substrate |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS57163204A JPS57163204A (en) | 1982-10-07 |
| JPS6157601B2 true JPS6157601B2 (en]) | 1986-12-08 |
Family
ID=12802556
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP56048411A Granted JPS57163204A (en) | 1981-04-02 | 1981-04-02 | Production of optical waveguide on glass substrate |
Country Status (2)
| Country | Link |
|---|---|
| US (1) | US4411678A (en]) |
| JP (1) | JPS57163204A (en]) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0413773U (en]) * | 1990-05-23 | 1992-02-04 |
Families Citing this family (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58115405A (ja) * | 1981-12-28 | 1983-07-09 | Fujikura Ltd | 厚膜導波路の製造方法 |
| GB2150858B (en) * | 1983-12-06 | 1986-11-26 | Standard Telephones Cables Ltd | Optical fibres |
| US4521443A (en) * | 1984-05-07 | 1985-06-04 | Northrop Corporation | Integrated optical waveguide fabrication by ion implantation |
| JPS6183506A (ja) * | 1984-09-29 | 1986-04-28 | Fujikura Ltd | 光回路の製法 |
| JPH0727089B2 (ja) * | 1985-02-18 | 1995-03-29 | 松下電器産業株式会社 | 光導波路レンズの製造方法 |
| US5221352A (en) * | 1989-06-19 | 1993-06-22 | Glaverbel | Apparatus for pyrolytically forming an oxide coating on a hot glass substrate |
| GB8914047D0 (en) * | 1989-06-19 | 1989-08-09 | Glaverbel | Method of and apparatus for pyrolytically forming an oxide coating on a hot glass substrate |
| US5368900A (en) * | 1991-11-04 | 1994-11-29 | Motorola, Inc. | Multistep laser ablation method for making optical waveguide reflector |
| US6154593A (en) * | 1996-03-18 | 2000-11-28 | Japan Science & Technology Corp | Optical device and formation of optical waveguide using light-induced effect on refractive index |
| US6947651B2 (en) * | 2001-05-10 | 2005-09-20 | Georgia Tech Research Corporation | Optical waveguides formed from nano air-gap inter-layer dielectric materials and methods of fabrication thereof |
| CN102173599A (zh) * | 2010-12-17 | 2011-09-07 | 敬承斌 | 二氧化锗空芯光波导的酸诱导液相沉积制备方法 |
| JP6212543B2 (ja) * | 2012-04-23 | 2017-10-11 | ローレンス リバモア ナショナル セキュリティー， エルエルシー | 局在的大気レーザー化学蒸着 |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE2402270C2 (de) * | 1974-01-18 | 1983-05-26 | Licentia Patent-Verwaltungs-Gmbh, 6000 Frankfurt | Verfahren zur Innenbeschichtung eines Quarzrohres und Vorrichtung zur Durchführung des Verfahrens |
| NL165134B (nl) * | 1974-04-24 | 1980-10-15 | Nippon Telegraph & Telephone | Werkwijze voor de vervaardiging van een staaf als tussenprodukt voor de vervaardiging van een optische vezel en werkwijze voor de vervaardiging van een optische vezel uit zulk een tussenprodukt. |
| JPS5266443A (en) * | 1975-11-29 | 1977-06-01 | Sumitomo Electric Ind Ltd | Production of glass fibers for light transmission |
| US4090776A (en) * | 1976-10-13 | 1978-05-23 | Honeywell Inc. | Fabrication of optical waveguides |
| JPS5367447A (en) * | 1976-11-28 | 1978-06-15 | Sumitomo Electric Ind Ltd | Production of optical fiber base material |
| JPS5445147A (en) * | 1977-09-16 | 1979-04-10 | Nippon Telegr & Teleph Corp <Ntt> | Production of glass rods for optical fibers |
-
1981
- 1981-04-02 JP JP56048411A patent/JPS57163204A/ja active Granted
-
1982
- 1982-03-31 US US06/364,048 patent/US4411678A/en not_active Expired - Lifetime
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0413773U (en]) * | 1990-05-23 | 1992-02-04 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS57163204A (en) | 1982-10-07 |
| US4411678A (en) | 1983-10-25 |
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